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Atomic Layer Etching of Magnetic and Noble Metals
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| 자료유형 | E-Book |
|---|---|
| 개인저자 | Altieri, Nicholas. |
| 단체저자명 | University of California, Los Angeles. Chemical Engineering 0294. |
| 서명/저자사항 | Atomic Layer Etching of Magnetic and Noble Metals. |
| 발행사항 | [S.l.] : University of California, Los Angeles., 2018 |
| 발행사항 | Ann Arbor : ProQuest Dissertations & Theses, 2018 |
| 형태사항 | 328 p. |
| 소장본 주기 | School code: 0031. |
| ISBN | 9780438089525 |
| 일반주기 |
Source: Dissertation Abstracts International, Volume: 79-11(E), Section: B.
Adviser: Jane P. Chang. |
| 요약 | This work has focused on the study and development of atomic layer etching for metallic and intermetallic thin films commonly used in front and back end of line applications. A thermodynamic equilibrium based framework consisting of minimization |
| 요약 | In order to achieve a self-limiting etch process for use in atomic scale patterning, O2 plasma modification in conjunction with the use of organic solution and vapor chemistries was studied as well. In concentrated solutions of acetylacetone, he |
| 일반주제명 | Chemical engineering. |
| 언어 | 영어 |
| 기본자료 저록 | Dissertation Abstracts International79-11B(E). Dissertation Abstract International |
| 대출바로가기 | http://www.riss.kr/pdu/ddodLink.do?id=T14999419 |
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| No. | 등록번호 | 청구기호 | 소장처 | 도서상태 | 반납예정일 | 예약 | 서비스 | 매체정보 |
|---|---|---|---|---|---|---|---|---|
| 1 | WE00027977 | 660 | 가야대학교/전자책서버(컴퓨터서버)/ | 대출가능 |
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