| LDR | | 01765nmm uu200385 4500 |
| 001 | | 000000333650 |
| 005 | | 20240805173435 |
| 008 | | 181129s2018 |||||||||||||||||c||eng d |
| 020 | |
▼a 9780438089525 |
| 035 | |
▼a (MiAaPQ)AAI10830311 |
| 035 | |
▼a (MiAaPQ)ucla:17102 |
| 040 | |
▼a MiAaPQ
▼c MiAaPQ
▼d 248032 |
| 082 | 0 |
▼a 660 |
| 100 | 1 |
▼a Altieri, Nicholas. |
| 245 | 10 |
▼a Atomic Layer Etching of Magnetic and Noble Metals. |
| 260 | |
▼a [S.l.] :
▼b University of California, Los Angeles.,
▼c 2018 |
| 260 | 1 |
▼a Ann Arbor :
▼b ProQuest Dissertations & Theses,
▼c 2018 |
| 300 | |
▼a 328 p. |
| 500 | |
▼a Source: Dissertation Abstracts International, Volume: 79-11(E), Section: B. |
| 500 | |
▼a Adviser: Jane P. Chang. |
| 502 | 1 |
▼a Thesis (Ph.D.)--University of California, Los Angeles, 2018. |
| 520 | |
▼a This work has focused on the study and development of atomic layer etching for metallic and intermetallic thin films commonly used in front and back end of line applications. A thermodynamic equilibrium based framework consisting of minimization |
| 520 | |
▼a In order to achieve a self-limiting etch process for use in atomic scale patterning, O2 plasma modification in conjunction with the use of organic solution and vapor chemistries was studied as well. In concentrated solutions of acetylacetone, he |
| 590 | |
▼a School code: 0031. |
| 650 | 4 |
▼a Chemical engineering. |
| 690 | |
▼a 0542 |
| 710 | 20 |
▼a University of California, Los Angeles.
▼b Chemical Engineering 0294. |
| 773 | 0 |
▼t Dissertation Abstracts International
▼g 79-11B(E). |
| 773 | |
▼t Dissertation Abstract International |
| 790 | |
▼a 0031 |
| 791 | |
▼a Ph.D. |
| 792 | |
▼a 2018 |
| 793 | |
▼a English |
| 856 | 40 |
▼u http://www.riss.kr/pdu/ddodLink.do?id=T14999419
▼n KERIS |
| 980 | |
▼a 201812
▼f 2019 |
| 990 | |
▼a 관리자 |