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High Dynamic Range CMOS-MEMS Capacitive Accelerometer Array with Drift Compensation

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자료유형	E-Book
개인저자	Guney, Metin G.
단체저자명	Carnegie Mellon University. Electrical and Computer Engineering.
서명/저자사항	High Dynamic Range CMOS-MEMS Capacitive Accelerometer Array with Drift Compensation.
발행사항	[S.l.] : Carnegie Mellon University., 2018
발행사항	Ann Arbor : ProQuest Dissertations & Theses, 2018
형태사항	277 p.
소장본 주기	School code: 0041.
ISBN	9780355940763
일반주기	Source: Dissertation Abstracts International, Volume: 79-10(E), Section: B. Adviser: Gary K. Fedder.
이용제한사항	This item is not available from ProQuest Dissertations & Theses.
요약	This thesis explains the design, fabrication and characterization steps of a high dynamic range CMOS-MEMS capacitive accelerometer array and on-chip environmental sensors for bias drift compensation. Inertial navigation under harsh environments
요약	PTAT temperature sensors, piezoresistive stress sensors and resonator-oscillators integrated across the accelerometer chip provide high-resolution environmental measurements for the compensation of long-term bias and scale factor drift. Simultan
요약	The CMOS-MEMS accelerometer system-on-chip is fabricated in a TowerJazz 0.18 microm CMOS process. The post-CMOS MEMS processing steps are tuned to reduce the top metal milling and sidewall polymer deposition. A reactive ion etch recipe is develo
요약	The PTAT temperature sensors have 3.1 mV/K measured sensitivity and 7.1 mK resolution with high repeatability. The compensation of the accelerometer readout for temperature variations down to 7.1 mK translates to 2.6 ppm scale factor stability f
요약	The accelerometer array is demonstrated to have 23.7 mG/&radic
요약	The long term bias drift of the accelerometer is shown to be correlated with the temperature and stress variations. Compensation of the accelerometer readout based on the stress and temperature sensor measurements leads to an observable improvem
일반주제명	Electrical engineering.
언어	영어
기본자료 저록	Dissertation Abstracts International79-10B(E). Dissertation Abstract International
대출바로가기	http://www.riss.kr/pdu/ddodLink.do?id=T14997870