자료유형 | E-Book |
---|---|
개인저자 | Crose, Marquis Grant. |
단체저자명 | University of California, Los Angeles. Chemical Engineering. |
서명/저자사항 | Multiscale Computational Fluid Dynamics Modeling: Parallelization and Application to Design and Control of Plasma-Enhanced Chemical Vapor Deposition of Thin Film Solar Cells. |
발행사항 | [S.l.] : University of California, Los Angeles., 2018 |
발행사항 | Ann Arbor : ProQuest Dissertations & Theses, 2018 |
형태사항 | 195 p. |
소장본 주기 | School code: 0031. |
ISBN | 9780438078048 |
일반주기 |
Source: Dissertation Abstracts International, Volume: 79-11(E), Section: B.
Adviser: Panagiotis D. Christofides. |
요약 | Today, plasma-enhanced chemical vapor deposition (PECVD) remains the dominant processing method for the manufacture of silicon thin films due to inexpensive production and low operating temperatures. Nonetheless, thickness non-uniformity continu |
요약 | Motivated by these considerations, novel reactor modeling and operational control strategies are developed in this dissertation. Specifically, a macroscopic reactor scale model is presented which captures the creation of a radio frequency (RF) p |
일반주제명 | Chemical engineering. Computational chemistry. Computational physics. |
언어 | 영어 |
기본자료 저록 | Dissertation Abstracts International79-11B(E). Dissertation Abstract International |
대출바로가기 | http://www.riss.kr/pdu/ddodLink.do?id=T14999329 |
인쇄
No. | 등록번호 | 청구기호 | 소장처 | 도서상태 | 반납예정일 | 예약 | 서비스 | 매체정보 |
---|---|---|---|---|---|---|---|---|
1 | WE00026406 | 660 | 가야대학교/전자책서버(컴퓨터서버)/ | 대출가능 |