| LDR | | 02022nmm uu200433 4500 |
| 001 | | 000000332079 |
| 005 | | 20240805165959 |
| 008 | | 181129s2018 |||||||||||||||||c||eng d |
| 020 | |
▼a 9780438078048 |
| 035 | |
▼a (MiAaPQ)AAI10829618 |
| 035 | |
▼a (MiAaPQ)ucla:17019 |
| 040 | |
▼a MiAaPQ
▼c MiAaPQ
▼d 248032 |
| 082 | 0 |
▼a 660 |
| 100 | 1 |
▼a Crose, Marquis Grant. |
| 245 | 10 |
▼a Multiscale Computational Fluid Dynamics Modeling: Parallelization and Application to Design and Control of Plasma-Enhanced Chemical Vapor Deposition of Thin Film Solar Cells. |
| 260 | |
▼a [S.l.] :
▼b University of California, Los Angeles.,
▼c 2018 |
| 260 | 1 |
▼a Ann Arbor :
▼b ProQuest Dissertations & Theses,
▼c 2018 |
| 300 | |
▼a 195 p. |
| 500 | |
▼a Source: Dissertation Abstracts International, Volume: 79-11(E), Section: B. |
| 500 | |
▼a Adviser: Panagiotis D. Christofides. |
| 502 | 1 |
▼a Thesis (Ph.D.)--University of California, Los Angeles, 2018. |
| 520 | |
▼a Today, plasma-enhanced chemical vapor deposition (PECVD) remains the dominant processing method for the manufacture of silicon thin films due to inexpensive production and low operating temperatures. Nonetheless, thickness non-uniformity continu |
| 520 | |
▼a Motivated by these considerations, novel reactor modeling and operational control strategies are developed in this dissertation. Specifically, a macroscopic reactor scale model is presented which captures the creation of a radio frequency (RF) p |
| 590 | |
▼a School code: 0031. |
| 650 | 4 |
▼a Chemical engineering. |
| 650 | 4 |
▼a Computational chemistry. |
| 650 | 4 |
▼a Computational physics. |
| 690 | |
▼a 0542 |
| 690 | |
▼a 0219 |
| 690 | |
▼a 0216 |
| 710 | 20 |
▼a University of California, Los Angeles.
▼b Chemical Engineering. |
| 773 | 0 |
▼t Dissertation Abstracts International
▼g 79-11B(E). |
| 773 | |
▼t Dissertation Abstract International |
| 790 | |
▼a 0031 |
| 791 | |
▼a Ph.D. |
| 792 | |
▼a 2018 |
| 793 | |
▼a English |
| 856 | 40 |
▼u http://www.riss.kr/pdu/ddodLink.do?id=T14999329
▼n KERIS |
| 980 | |
▼a 201812
▼f 2019 |
| 990 | |
▼a 관리자 |