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020 ▼a 9780438010291
035 ▼a (MiAaPQ)AAI10793581
035 ▼a (MiAaPQ)purdue:22624
040 ▼a MiAaPQ ▼c MiAaPQ ▼d 248032
0820 ▼a 621
1001 ▼a Alrefae, Majed A.
24510 ▼a Process Characterization and Optimization of Roll-to-roll Plasma Chemical Vapor Deposition for Graphene Growth.
260 ▼a [S.l.] : ▼b Purdue University., ▼c 2018
260 1 ▼a Ann Arbor : ▼b ProQuest Dissertations & Theses, ▼c 2018
300 ▼a 174 p.
500 ▼a Source: Dissertation Abstracts International, Volume: 79-10(E), Section: B.
500 ▼a Advisers: Timothy S. Fisher
5021 ▼a Thesis (Ph.D.)--Purdue University, 2018.
520 ▼a The main purpose of this thesis is to develop an efficient and scalable technique for depositing graphene on various flexible substrates. Hence, a custom-built roll-to-roll capacitively coupled plasma chemical vapor system for deposition of grap
520 ▼a Plasma plays a crucial role in heating the foil for graphene deposition in the roll-to-roll process, without the need of a supplemental heating source. Thus, accurate measurement of the translational gas temperature in the plasma is vital, since
520 ▼a Graphene quality significantly depends on gas pressure since our plasma roll-to-roll system is sustained by a capacitively coupled plasma that operates in two modes, depending on the gas pressure and discharge gap. The modes are identified as al
520 ▼a As a results of these plasma characterization tools, we report a continuous and rapid roll-to-roll deposition of thin graphite film on Cu foil. The composition of the Ar/H2/CH4/N2/O2 plasma plays significant role in the successful direct growth
590 ▼a School code: 0183.
650 4 ▼a Mechanical engineering.
650 4 ▼a Nanotechnology.
650 4 ▼a Materials science.
690 ▼a 0548
690 ▼a 0652
690 ▼a 0794
71020 ▼a Purdue University. ▼b Mechanical Engineering.
7730 ▼t Dissertation Abstracts International ▼g 79-10B(E).
773 ▼t Dissertation Abstract International
790 ▼a 0183
791 ▼a Ph.D.
792 ▼a 2018
793 ▼a English
85640 ▼u http://www.riss.kr/pdu/ddodLink.do?id=T14997760 ▼n KERIS
980 ▼a 201812 ▼f 2019
990 ▼a 관리자