LDR | | 02403nmm uu200457 4500 |
001 | | 000000332936 |
005 | | 20240805171853 |
008 | | 181129s2018 |||||||||||||||||c||eng d |
020 | |
▼a 9780438010291 |
035 | |
▼a (MiAaPQ)AAI10793581 |
035 | |
▼a (MiAaPQ)purdue:22624 |
040 | |
▼a MiAaPQ
▼c MiAaPQ
▼d 248032 |
082 | 0 |
▼a 621 |
100 | 1 |
▼a Alrefae, Majed A. |
245 | 10 |
▼a Process Characterization and Optimization of Roll-to-roll Plasma Chemical Vapor Deposition for Graphene Growth. |
260 | |
▼a [S.l.] :
▼b Purdue University.,
▼c 2018 |
260 | 1 |
▼a Ann Arbor :
▼b ProQuest Dissertations & Theses,
▼c 2018 |
300 | |
▼a 174 p. |
500 | |
▼a Source: Dissertation Abstracts International, Volume: 79-10(E), Section: B. |
500 | |
▼a Advisers: Timothy S. Fisher |
502 | 1 |
▼a Thesis (Ph.D.)--Purdue University, 2018. |
520 | |
▼a The main purpose of this thesis is to develop an efficient and scalable technique for depositing graphene on various flexible substrates. Hence, a custom-built roll-to-roll capacitively coupled plasma chemical vapor system for deposition of grap |
520 | |
▼a Plasma plays a crucial role in heating the foil for graphene deposition in the roll-to-roll process, without the need of a supplemental heating source. Thus, accurate measurement of the translational gas temperature in the plasma is vital, since |
520 | |
▼a Graphene quality significantly depends on gas pressure since our plasma roll-to-roll system is sustained by a capacitively coupled plasma that operates in two modes, depending on the gas pressure and discharge gap. The modes are identified as al |
520 | |
▼a As a results of these plasma characterization tools, we report a continuous and rapid roll-to-roll deposition of thin graphite film on Cu foil. The composition of the Ar/H2/CH4/N2/O2 plasma plays significant role in the successful direct growth |
590 | |
▼a School code: 0183. |
650 | 4 |
▼a Mechanical engineering. |
650 | 4 |
▼a Nanotechnology. |
650 | 4 |
▼a Materials science. |
690 | |
▼a 0548 |
690 | |
▼a 0652 |
690 | |
▼a 0794 |
710 | 20 |
▼a Purdue University.
▼b Mechanical Engineering. |
773 | 0 |
▼t Dissertation Abstracts International
▼g 79-10B(E). |
773 | |
▼t Dissertation Abstract International |
790 | |
▼a 0183 |
791 | |
▼a Ph.D. |
792 | |
▼a 2018 |
793 | |
▼a English |
856 | 40 |
▼u http://www.riss.kr/pdu/ddodLink.do?id=T14997760
▼n KERIS |
980 | |
▼a 201812
▼f 2019 |
990 | |
▼a 관리자 |