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020 ▼a 1785616560
020 ▼a 9781785616563 ▼q (electronic bk.)
020 ▼z 9781785616556
020 ▼z 1785616552
035 ▼a 2345949 ▼b (N$T)
035 ▼a (OCoLC)1132297460
040 ▼a STF ▼b eng ▼c STF ▼d OCLCO ▼d UIU ▼d CUS ▼d OCLCF ▼d EBLCP ▼d N$T ▼d 248032
049 ▼a MAIN
050 4 ▼a TK7871.85
072 7 ▼a A0130E ▼2 inspec
072 7 ▼a A6170T ▼2 inspec
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072 7 ▼a A6170 ▼2 inspec
072 7 ▼a A7855 ▼2 inspec
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072 7 ▼a B2520 ▼2 inspec
072 7 ▼a B2550R ▼2 inspec
08204 ▼a 621.38152
24500 ▼a Characterisation and Control of Defects in Semiconductors / ▼c edited by Filip Tuomisto.
260 ▼a Stevenage : ▼b The Institution of Engineering and Technology, ▼c 2019.
300 ▼a 1 online resource (596 pages).
336 ▼a text ▼b txt ▼2 rdacontent
337 ▼a computer ▼b c ▼2 rdamedia
338 ▼a online resource ▼b cr ▼2 rdacarrier
4901 ▼a IET Materials, Circuits & Devices Series ; ▼v 45
520 ▼a The following topics are dealt with: semiconductor defect control; semiconductor doping; ion beam effects; ion implantation; elemental semiconductors; silicon; electrically active defects; point defect luminescence; vibrational spectroscopy; magnetic resonance methods; muons; positron annihilation spectroscopy; first principles methods; microscopy; 3D atomic-scale studies; ion beam modification; and ion beam analysis and channelling.
5880 ▼a Online resource; title from PDF title page (IET Digital, viewed January 13, 2020).
590 ▼a Master record variable field(s) change: 050
650 0 ▼a Ion implantation.
650 0 ▼a Magnetic resonance.
650 0 ▼a Semiconductor doping.
650 0 ▼a Semiconductors ▼x Materials.
650 0 ▼a Silicon.
650 7 ▼a Ion implantation. ▼2 fast ▼0 (OCoLC)fst00978590
650 7 ▼a Magnetic resonance. ▼2 fast ▼0 (OCoLC)fst01005777
650 7 ▼a Semiconductor doping. ▼2 fast ▼0 (OCoLC)fst01112124
650 7 ▼a Semiconductors ▼x Materials. ▼2 fast ▼0 (OCoLC)fst01112237
650 7 ▼a Silicon. ▼2 fast ▼0 (OCoLC)fst01118631
650 7 ▼a crystal defects. ▼2 inspect
650 7 ▼a ion beam effects. ▼2 inspect
650 7 ▼a ion implantation. ▼2 inspect
650 7 ▼a luminescence. ▼2 inspect
650 7 ▼a magnetic resonance. ▼2 inspect
650 7 ▼a microscopy. ▼2 inspect
650 7 ▼a positron annihilation. ▼2 inspect
650 7 ▼a semiconductor doping. ▼2 inspect
650 7 ▼a semiconductor materials. ▼2 inspect
650 7 ▼a silicon. ▼2 inspect
653 ▼a semiconductor defects
653 ▼a electrically active defects
653 ▼a point defect luminescence
653 ▼a vibrational spectroscopy
653 ▼a magnetic resonance methods
653 ▼a muons
653 ▼a positron annihilation spectroscopy
653 ▼a first principles methods
653 ▼a microscopy
653 ▼a 3D atomic-scale studies
653 ▼a ion beam modification
653 ▼a ion beam analysis
653 ▼a channelling
653 ▼a silicon
653 ▼a elemental semiconductors
653 ▼a ion implantation
653 ▼a ion beam effects
653 ▼a semiconductor doping
655 4 ▼a Electronic books.
7001 ▼a Tuomisto, Filip, ▼e editor.
830 0 ▼a Materials, circuits and devices series ; ▼v 45.
85640 ▼3 EBSCOhost ▼u http://search.ebscohost.com/login.aspx?direct=true&scope=site&db=nlebk&db=nlabk&AN=2345949
938 ▼a ProQuest Ebook Central ▼b EBLB ▼n EBL6026414
938 ▼a EBSCOhost ▼b EBSC ▼n 2345949
990 ▼a 관리자
994 ▼a 92 ▼b N$T