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Force Sensing by Electrical Contact Resistance in SOI-DRIE MEMS
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| 자료유형 | E-Book |
|---|---|
| 개인저자 | Rauscher, Scott Gibson. |
| 단체저자명 | University of Maryland, College Park. Mechanical Engineering. |
| 서명/저자사항 | Force Sensing by Electrical Contact Resistance in SOI-DRIE MEMS. |
| 발행사항 | [S.l.] : University of Maryland, College Park., 2018 |
| 발행사항 | Ann Arbor : ProQuest Dissertations & Theses, 2018 |
| 형태사항 | 193 p. |
| 소장본 주기 | School code: 0117. |
| ISBN | 9780438139947 |
| 일반주기 |
Source: Dissertation Abstracts International, Volume: 79-11(E), Section: B.
Advisers: Hugh Bruck |
| 요약 | MEMS force sensors employ microfabricated elements to convert applied external forces to electrical signals, typically by piezoelectric, piezoresistive, or capacitive transduction. While existing force sensors based on these sensing principles h |
| 요약 | While several analytic models were combined to create an ECR-force model for predicting ECR-force sensitivity in systems containing differing contact geometry, topology, and electrical properties, experimental testing is the focal point of this |
| 요약 | The use of DRIE, as opposed to additive poly-Silicon-based fabrication, allows a tailorable force range through proof mass sizing and aspect ratio changes, adjustable pre-load through simple design, and integration of an ECR force sensor into ex |
| 일반주제명 | Mechanical engineering. |
| 언어 | 영어 |
| 기본자료 저록 | Dissertation Abstracts International79-11B(E). Dissertation Abstract International |
| 대출바로가기 | http://www.riss.kr/pdu/ddodLink.do?id=T14996813 |
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| No. | 등록번호 | 청구기호 | 소장처 | 도서상태 | 반납예정일 | 예약 | 서비스 | 매체정보 |
|---|---|---|---|---|---|---|---|---|
| 1 | WE00024461 | DP 621 | 가야대학교/전자책서버(컴퓨터서버)/ | 대출불가(별치) |
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