가야대학교 분성도서관
주메뉴
자료검색
- Home
- 상세정보
상세정보
부가기능
Flexible Polymer Mold and UV-Curable Materials for Nanoimprint and Advanced Nanofabrication
상세 프로파일
| 자료유형 | E-Book |
|---|---|
| 개인저자 | Zhang, Qi. |
| 단체저자명 | Princeton University. Electrical Engineering. |
| 서명/저자사항 | Flexible Polymer Mold and UV-Curable Materials for Nanoimprint and Advanced Nanofabrication. |
| 발행사항 | [S.l.] : Princeton University., 2018 |
| 발행사항 | Ann Arbor : ProQuest Dissertations & Theses, 2018 |
| 형태사항 | 179 p. |
| 소장본 주기 | School code: 0181. |
| ISBN | 9780438047785 |
| 일반주기 |
Source: Dissertation Abstracts International, Volume: 79-10(E), Section: B.
Adviser: Stephen Chou. |
| 요약 | As an emerging nanofabrication technique, nanoimprint lithography (NIL) has inspired and realized tremendous inventions of high-performance electronic, photonic, biological and nanodevices. However, challenges are still present in order to embra |
| 요약 | This work contributes several unique solutions: (1) By manipulating post-imprint Cr etching mask transfer (e.g., inversion, transformation and multiplication) with multi-layer material stack, shadowed film deposition and consecutive imprints, la |
| 일반주제명 | Nanotechnology. |
| 언어 | 영어 |
| 기본자료 저록 | Dissertation Abstracts International79-10B(E). Dissertation Abstract International |
| 대출바로가기 | http://www.riss.kr/pdu/ddodLink.do?id=T14998123 |
소장정보
- 소장정보
인쇄
| No. | 등록번호 | 청구기호 | 소장처 | 도서상태 | 반납예정일 | 예약 | 서비스 | 매체정보 |
|---|---|---|---|---|---|---|---|---|
| 1 | WE00027541 | DP 620.5 | 가야대학교/전자책서버(컴퓨터서버)/ | 대출불가(별치) |
|
카피라이터
